E SC 214 - Patterning for Nanotechnology

Course Description

Pattern transfer techniques from photolightography to nanoimprinting and nanomolding.

E SC 214 - Patterning for Nanotechnology (3): This course is a hands-on treatment of all aspects of advanced pattern transfer and pattern transfer equipment including probe techniques; stamping and embossing; e-beam; and optical contact and stepper systems. The course is divided into five major sections. The first section is an overview of all pattern generation processes covering aspects from substrate preparation to tool operation. The second section concentrates on photolithography and examines such topics as mask template, and mold generation. Chemical makeup of resists will be discussed including polymers, solvents, sensitizers, and additives. The role or dyes and antireflective coatings will be discussed. In addition, critical dimension (CD) control and profile control of resists will be investigated. The third section will discuss the particle beam lithographic techniques such as e-beam lithography. The fourth section covers probe pattern generation and the fifth section explores imprinting lithography, nano-molding lithography, step-and-flash, stamp lithography, and self-assembled lithography.

Course Prerequisites

  • Concurrent: E SC 211, E SC 212

Additional Information

Office for Disability Services

Penn State welcomes students with disabilities into the University’s educational programs. If you have a disability‐related need for reasonable academic adjustments in this course, contact the Office for Disability Services (ODS) at 814‐863‐1807 (V/TTY). For further information regarding ODS, please visit the Office of Disability Services website at http://equity.psu.edu/ods

Fonash, Stephen

STEPHEN FONASH

KUNKLE CHAIR PROFESSOR EMERITIS

Engineering Science and Mechanics

Office: 118 RESEARCH BUILDING WEST

Email: 

Phone: 814-865-4931

 
 

About

The Office for Digital Learning in the College of Engineering supports engineers in lifelong learning - the process of acquiring the skills and knowledge necessary to remain current in a chosen field. In today's rapidly-changing, knowledge-based economy, engineers must devote the time and effort to learn new skills and technologies in order to add value for their employers and clients and to remain personally marketable. 

Office for Digital Learning

College of Engineering

301-A Engineering Unit C

The Pennsylvania State University

University Park, PA 16802

Phone: 814-865-7643

E-mail: odl@engr.psu.edu